介质类型Gas流量测量原理Thermal (TMF)流量范围Standard GF Series: 3 sccm - 55 slpm, High Flow GF Series: 55 slpm - 300 slpm精度范围Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%, High Flow GF Series: ±1% S.P
| 介质类型 | Gas |
|---|---|
| 流量测量原理 | Thermal (TMF) |
| 流量范围 | Standard GF Series: 3 sccm - 55 slpm, High Flow GF Series: 55 slpm - 300 slpm |
| 精度范围 | Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%, High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35% |
| 调节比 | Standard GF Series: 2-100%, High Flow GF Series: 5-100% |
| 重复性 | 5 - 100% = ±0.15% S.P, .2 - 5% = ±0.015% F.S. |
| 最大压力 | 500 psi |
| 工作温度 | 10°C - 50°C |
| 测量/控制 | Measure & Control (Controller), Measure Only (Meter) |
| 最大流量 | 300 slpm |
| 最高温度 | 50 celsius |
| 密封选项 | Metal |
| 精度（占流量百分比） | ±1.0% |
| 连接方式 | RS485, DeviceNet |
